Deposition of Silicon Films from Liquid Cyclopentasilane Precursors Using High Pressure Spray System
H. Frey, R. Lauth, H. R. Khan, N. Eisenreich & A. Koleczko · Physical Science International Journal · 2017
Si- films were deposited from liquid precursors, especially cyclopentasilane using a high pressure spray deposition system based on an electronically controlled piezo-injector in a inert gas atmosphere. This equipment might be applicable to other liquid precursors and targeted th...
Open access
Research Article
10.9734/PSIJ/2017/33788