Superharmonic Solutions of Order (2,3) to a MEMS Governed the Motion of a TM-AFM Cantilever
A. M. Elnaggar, K. M. Khalil & A. S. Rahby · Journal of Scientific Research and Reports · 2016
The superharmonic solutions of a weakly nonlinear second order differential equation governed the dynamic behavior of a microcantilever based on TM (Tapping mode) AFM (Atomic force microscopy) are studied analytically by applying the method of multiple scales (MMS). The modulatio...