Data-Driven Predictive Control Strategy for Rapid Thermal Processing Systems
Huaiqian Zhang, Yongli Zhang, Aihua Jiang, Guofeng Ji & Lihui Geng · Journal of Engineering Research and Reports · 2025
Rapid Thermal Processing (RTP) is a key technology for semiconductor manufacturing. However, the strong coupling, nonlinearities, and multiple disturbances inherent in RTP render accurate physical modeling extremely challenging. This paper studies the application of subspace pred...