Balachandar Jeganathan

Comparative Analysis of Fully Convolutional Networks (FCN), SegNet, and U-Net for Semantic Segmentation of Synthetic Wafer Map Defect Patterns

Balachandar Jeganathan · Asian Journal of Advanced Research and Reports · 2026

Wafer defect maps serve as a primary diagnostic tool for process engineers, enabling the visualization of spatial defect distributions and the identification of potential equipment or process issues. As technology nodes shrink and device densities increase, the volume of inspecti...