Hossein Salarpour

Finite Element Modeling of Timoshenko Micro-beam Based MEMS Sensor Behavior against Variation in Poisson’s Ratio

Hossein Salarpour & Mohammad Tahmasebipour · Current Journal of Applied Science and Technology · 2016

Epoxy Micro-beams are used in microelectromechanical systems (MEMS) for sensoring applications in two operating mode of deflection and resonant frequency shift. One of the main questions in micro-beam based MEMS sensors behavior is effect of Poisson’s ratio on the deflection and...