Data-Driven Predictive Control Strategy for Rapid Thermal Processing Systems
Huaiqian Zhang, Yongli Zhang, Aihua Jiang, Guofeng Ji & Lihui Geng · Journal of Engineering Research and Reports · 2025
Rapid Thermal Processing (RTP) is a key technology for semiconductor manufacturing. However, the strong coupling, nonlinearities, and multiple disturbances inherent in RTP render accurate physical modeling extremely challenging. This paper studies the application of subspace pred...
Open access
Research Article
10.9734/jerr/2025/v27i101666