Application of the Level Set Method in Three-Dimensional Simulations of the Profile Evolution
Branislav Radjenović, Marija Radmilović-Radjenović & Petar Beličev · International Research Journal of Pure and Applied Chemistry · 2014
In this paper, the angular dependence of the etching rate is applied in the three-dimensional simulations of the profile evolution during etching process. Etching rates are determined from the silicon symmetry properties by the interpolation technique using experimentally obtaine...
Open access
Research Article
10.9734/IRJPAC/2014/8704