Production of Low Electron-Temperature and High Density Plasma by Using a Grid-Cage Electrode for RF Discharge
Kohgi Kato, Takuma Gohda & Satoru Iizuka · Journal of Scientific Research and Reports · 2016
An original method for producing low electron temperature and high electron density plasma was studied experimentally by using a rectangular grid-cage as a capacitively-coupled powered electrode in a radio frequency (RF) discharge. A rectangular grid-cage electrode was placed on...
Open access
Research Article
10.9734/JSRR/2016/26362