Developing Integrated MEMS Products for Medical and Industrial Markets
Tapani Koivukangas & Tommi Matila · Current Journal of Applied Science and Technology · 2014
Aims: As the trend in technology is shifting toward smaller and more compact devices with requirements for more accurate measurement systems, new sensors and components enabling this trend are also being brought to market. Micro electromechanical sensors (MEMS) and devices utiliz...
Open access
Research Article
10.9734/BJAST/2014/5756